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Neuberger Berman Group LLC
> MKSI
| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 06/30/2023 | MKS INSTRUMENTS INC | MKSI | 1,607,714 | -87,849 | 173,793,883,000 | 23,533,090,000 | $108,100.00 |
| 03/31/2023 | MKS INSTRUMENTS INC | MKSI | 1,695,563 | -26,596 | 150,260,793,000 | 150,118,474,000 | $88,620.00 |
| 09/30/2022 | MKS INSTRUMENTS INC | MKSI | 1,722,159 | 222,821 | 142,319,000 | -11,558,000 | $82.64 |
| 06/30/2022 | MKS INSTRUMENTS INC | MKSI | 1,499,338 | 245,717 | 153,877,000 | -34,172,000 | $102.63 |
| 03/31/2022 | MKS INSTRUMENTS INC | MKSI | 1,253,621 | -18,936 | 188,049,000 | -31,706,000 | $150.00 |
| 12/31/2021 | MKS INSTRUMENTS INC | MKSI | 1,272,557 | -28,700 | 219,755,000 | 24,475,000 | $172.69 |
| 09/30/2021 | MKS INSTRUMENTS INC | MKSI | 1,301,257 | -25,157 | 195,280,000 | -38,941,000 | $150.07 |
| 06/30/2021 | MKS INSTRUMENTS INC | MKSI | 1,326,414 | -35,105 | 234,221,000 | -17,274,000 | $176.58 |
| 03/31/2021 | MKS INSTRUMENTS INC | MKSI | 1,361,519 | 9,160 | 251,495,000 | 48,190,000 | $184.72 |
| 12/31/2020 | MKS INSTRUMENTS INC | MKSI | 1,352,359 | -35,751 | 203,305,000 | 51,691,000 | $150.33 |
| 09/30/2020 | MKS INSTRUMENTS INC | MKSI | 1,388,110 | 64,870 | 151,614,000 | 1,780,000 | $109.22 |
| 06/30/2020 | MKS INSTRUMENTS INC | MKSI | 1,323,240 | 122,072 | 149,834,000 | 51,999,000 | $113.23 |
| 03/31/2020 | MKS INSTRUMENTS INC | MKSI | 1,201,168 | 1,201,168 | 97,835,000 | 97,835,000 | $81.45 |
| 12/31/2019 | MKS INSTRUMENTS INC | MKSI | 0 | -1,357,403 | 0 | -125,261,000 | |
| 09/30/2019 | MKS INSTRUMENTS INC | MKSI | 1,357,403 | -107,998 | 125,261,000 | 11,121,000 | $92.28 |
| 06/30/2019 | MKS INSTRUMENTS INC | MKSI | 1,465,401 | 46,858 | 114,140,000 | -17,855,000 | $77.89 |
| 03/31/2019 | MKS INSTRUMENTS INC | MKSI | 1,418,543 | 60,100 | 131,995,000 | 44,226,000 | $93.05 |
| 12/31/2018 | MKS INSTRUMENTS INC | MKSI | 1,358,443 | 185,785 | 87,769,000 | -6,220,000 | $64.61 |
| 09/30/2018 | MKS INSTRUMENTS INC | MKSI | 1,172,658 | 46,125 | 93,989,000 | -13,820,000 | $80.15 |
| 06/30/2018 | MKS INSTRUMENTS INC | MKSI | 1,126,533 | 34,975 | 107,809,000 | -18,430,000 | $95.70 |
| 03/31/2018 | MKS INSTRUMENTS INC | MKSI | 1,091,558 | -25,785 | 126,239,000 | 20,650,000 | $115.65 |
| 12/31/2017 | MKS INSTRUMENTS INC | MKSI | 1,117,343 | -235,115 | 105,589,000 | -22,151,000 | $94.50 |
| 09/30/2017 | MKS INSTRUMENTS INC | MKSI | 1,352,458 | -39,820 | 127,740,000 | 34,040,000 | $94.45 |
| 06/30/2017 | MKS INSTRUMENTS INC | MKSI | 1,392,278 | -17,522 | 93,700,000 | -3,224,000 | $67.30 |
| 03/31/2017 | MKS INSTRUMENTS INC | MKSI | 1,409,800 | -1,561 | 96,924,000 | 13,089,000 | $68.75 |
| 12/31/2016 | MKS INSTRUMENTS INC | MKSI | 1,411,361 | 76,178 | 83,835,000 | 17,436,000 | $59.40 |
| 09/30/2016 | MKS INSTRUMENTS INC | MKSI | 1,335,183 | 585,133 | 66,399,000 | 39,397,000 | $49.73 |
| 06/30/2016 | MKS INSTRUMENTS INC | MKSI | 1,296,952 | 365,802 | 55,847,000 | 20,789,000 | $43.06 |
| 03/31/2016 | MKS INSTRUMENTS INC | MKSI | 931,150 | 181,100 | 35,058,000 | 8,056,000 | $37.65 |
| 12/31/2015 | MKS INSTRUMENTS INC | MKSI | 750,050 | 750,050 | 27,002,000 | 27,002,000 | $36.00 |
| 09/30/2015 | MKS INSTRUMENTS INC | MKSI | 150,100 | 150,100 | 5,033,000 | 5,033,000 | $33.53 |
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